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    6寸蓝宝石衬底

    2018-10-29

    蓝宝石晶片

    Item

    6"

    Unit

     Dimension

    Diameter:

    150 ± 0.2

    mm

    Thickness:

    1300 ± 20

    um

    Primary Flat:

    47.51.0

    mm

    Orientation

    Surface-cut:

    C plane : Tilt 0.2°±0.1° in M axis /

    ~

    Primary Flat:

    A plane : 0° ± 0.15°

    ~

    Flatness

    Bow:

     0 ~ (-10)

    um

    Warp:

     20

    um

    Total Thickness Variation (TTV):

     10

    um

    LTV

    2.5

    um

    Front side Roughness

    0.2

    nm

    Back side Roughness

    0.8-1.2

    um

    Cleanliness

    No particles and fingerprints

    ~

    4.Material Quality

    High-purity mono-crystal Al2O3

    ~

    5.Package

    Wafers are packed in cleaned wafer cassettes containing 25 wafers under clean room environment.

    ~

    6.Trace Ability

    Wafers shall be traceable with respect to cassette number. The wafer box should be marked with a removable label showing the date, the cassette number and the quantity.

    ~

    7.Laser Mark

    Front or Back side

    ~


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